https://nova.newcastle.edu.au/vital/access/ /manager/Index ${session.getAttribute("locale")} 5 High precision MEMS displacement sensors: device techniques and readout circuits https://nova.newcastle.edu.au/vital/access/ /manager/Repository/uon:15397 Wed 11 Apr 2018 13:01:43 AEST ]]> Piezo displacement sensors for a compact high-speed x–y nanopositioner in differential actuation mode https://nova.newcastle.edu.au/vital/access/ /manager/Repository/uon:52142 Wed 04 Oct 2023 10:15:01 AEDT ]]> Non-collocated displacement sensing by semiconductor strain gauges in differentially piezo-driven nanopositioners https://nova.newcastle.edu.au/vital/access/ /manager/Repository/uon:39457 Thu 09 Jun 2022 08:33:23 AEST ]]> Displacement sensing with silicon flexures in MEMS nanopositioners https://nova.newcastle.edu.au/vital/access/ /manager/Repository/uon:20733 Sat 24 Mar 2018 08:00:27 AEDT ]]> Design and analysis of nonuniformly shaped heaters for improved MEMS-based electrothermal displacement sensing https://nova.newcastle.edu.au/vital/access/ /manager/Repository/uon:19956 Sat 24 Mar 2018 07:58:33 AEDT ]]>